Gas Filtration

Entegris provides filtration and purification components designed to improve your critical gas specifications, as well as minimize particulate deposition. Removing contamination down to the ppt level, the GateKeeper® purifiers eliminate both particle and molecular contamination (e.g., moisture) from process gas.

 
 
Aeronex® Gas Purification Systems

GateKeeper® Gas Purifiers

Wafergard® SG Gas Purifiers

Linegard™ Max FP

Linegard™ GIGAX-FP Filters