Chemical Delivery

Chemicals, though pure when delivered, may be contaminated by process components while transported to and through the process tool. Choosing the correct components to function with other process variables and optimize chemical compatibility is important. To meet your challenging process requirements, Entegris offers a full range of high-purity and high-performance components. 

 
Valves
High Purity Corrosion-resistant Valves
CR8 Valves

Fittings and Tubing
Ultrapure Flare Style PFA Tube Fittings
PrimeLock™ Fittings
Pass-through Dual Containment, Flaretek® × Quikgrip®

Containers
FluoroPure® 100 Liter PFA Pressure Vessel
Cascade® 2000 Process Tank
Custom Tanks and Containers

Dispense Tubes
Recirculating DI Water Spray Gun and Kit

Sensing and Control Products
Sensing and Control
NT® Integrated Flow Controller, Model 6520
NT® Electronic Flowmeter, Model 5400
NT® Pressure Transducer, Single-port, Model 4100
NT® Pressure Transducer, Flow-through, Model 4210
Espy® Sensing Products

Fluid Handling Custom Fabrication Service
Fluid Handling Custom Fabrication Service