Graphite/SiC/Specialty Coatings

Providing custom turnkey components in graphite, silicon carbide and a variety of coating options, Entegris materials meet your dimensional and process requirements. High-temperature SUPERSiC® or POCO® graphite components offer inertness in reactive environments reducing preventive maintenance and replacement. The ultra high-purity materials can be custom designed to replace quartz, metals or other materials.

Entegris SUPERSiC wafer carriers remain dimensionally stable throughout multiple process cycles and acid cleanings. Flexible design options provide alternatives to wafer positioning and pitch. In wafer plates and boat assemblies, Entegris offers reduced breakage during removal, cleaning and improved uniformity during the deposition process.

Pyrolytic carbon coated graphite offers the advantages of graphite with a closed surface, eliminating particle shedding and blocking infiltration of source materials without a significant increase in cost. Look to Entegris for your custom high-purity materials and components.

Premium Graphite and Silicon Carbide

Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

Physical Vapor Deposition (PVD) Coatings