Process and Transport Carriers

Working from customer issues, Entegris created its carriers to eliminate unwanted process effects that negatively impact cell performance. Enjoy mechanical stability even after months of exposure to aggressive chemistries, with the confidence that your process is still clean from the carrier’s compatible materials of construction.


Carriers
156 mm Process Carrier
125 mm and 100 mm Process Carriers
E Series Mask Carrier
Miscellaneous Carriers
Custom Carriers

Storage
125 mm (5″) Wafer Storage Box
H60 Series Mask Packages
Bare Die/CSP Products

Accessories
125 mm (5″) Wafer Handling Accessories
Dippers
Beakers and Funnels
Tongs
Tweezers

OTHER PRODUCTS

  • Chemical Delivery
  • Gas Filtration
  • Gas Purification
  • Liquid Filtration
  • Liquid Purification
  • Specialty Materials
  • Process and Transport Carriers
  • Substrate Shipping
  • Chemical Blending and Flow Control

    • View All Applications & Products

    Featured Product

    Wet Process Carrier Provides Reliability

    Offering serviceability and a cleaner batch process with fewer cell defects

    More >>

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